Nanoporous Silica Thin Films Synthesis by Sol-Gel Process


  • Farid M. Hota Department of Chemistry, Faculty of Science, Sirte University, Sirte, Libya
  • Wafia M. Emhalhal Department of Chemistry, Faculty of Science, Sirte University, Sirte, Libya


thin films, nanoporous, glass substrate, Homogeneity, pore size, pore volume, pore size distribution, ordering, Nitrogen adsorption isotherm, HRTEM-ED, PAS


Synthesis of thin films of nanoporous silica on glass substrate is very delicate process in sol- gel synthesis technique. Homogeneity of the film prepared and its continuity affected by the conditions of the reaction. It was found that the physical and optical properties of mesoporous thin films prepared through surfactant templating as pore size, pore volume, pore size distribution, and ordering depend on the concentration of the surfactant used. Physical properties of thin film characterized by Nitrogen adsorption isotherm, HRTEM- ED, and Photoacoustic Spectroscopy (PAS).


D. Arcos, D.C. Greenspan, and M. Vallet-Regi, Chem. Mater.

, 1515 (2002).

S.B. Cho, K. Nakanishi, T. Kokubo, N. Soga, C. Ohtsuki, T. Nakamura, T. Kitsugi, and T. Yamamuro, J. Am. Ceram. Soc. 78, 1769 (1995).

C. Kinowski, M. Bouazaoui, R. Bechara, L.L. Hench, J.M. Nedelec, and S. Turrell, J. Non-Cryst. Solids 291, 143 (2001).

J.S. Beck, J.C. Vartuli, W.J. Roth, M.E. Leonowiez, C.T. Kresge,

K.D. Schimitt, C.T.-W. Chu, D.H. Olson, E.W. Sheppard, S.B. McCullen, J.B. Higgins, and J.L. Schlenker, J. Am. Chem. Soc. 114, 10834 (1992).

S. Inagaki, Y. Fukushima, and K. Kuroda, J. Chem. Soc. Chem. Commun. 680 (1993).

K. Moller, and T. Bein, Chem. Mater. 10, 2950 (1998).

C.M. Yang, H.S. Sheu, and K.J. Chao, Adv. Funct. Mater. 12, 143 (2001).

A. Stein, B.J. Melde, and R.C. Schroden, Adv. Mater. 12, 1403 (2000).

F. Schüth, Stud. Surf. Sci. Catal. 135, 1 (2001).

J.Y. Ying, C.P. Mehnert, and M.S. Wong, Angew. Chem. Int. Ed. Engl. 38, 56 (1998).

F. Schüth, Chem. Mater. 13, 3184 (2001).

F. Bosc, A. Ayral, P.A. Albouy, L. Datas, and C. Guizard, Chem. Mater. 16, 2208 (2004).

G.D. Stucky, D. Zhao, P. Yang, W. Lukens, N. Melash, and B.F. Chemelka, Stud. Surf. Sci. Catal. 117, 1 (1998).

P.T. Tanev, and T.J. Pinnavaia, Science 267, 865 (1995).

N. CoombsYang, and G.A. Ozin, Nature 386, 692 (1997).

M. Ogawa, and N. Masukawa, Micropor. Mesopor. Mater. 38, 35 (2000).

G.S.Attard, J.C. Glyde, and C.G. Göltner, Nature 378, 366 (1995).

S. Che, Z. Liu, T. Ohsuna, K. Sakamoto, O. Terasaki, and T. Tatsumi, Nature 429, 281 (2004).

P.J. Bruinsma, N.J. Hess, J.R. Bontha, and J. Liu, S. Baskaran,

in: Proc. MRS Symposium on Low Dielectric Constant Materials II, Materials Research Society, Pittsburgh, PA, 105 (1997).

C. Soler-Illia Sanchez, G.J. D.A., F. Ribot, D. Grosso, and C. R. Chimie 6, 1131 (2003).

A. Bearzotti, J.M. Bertolo, P. Innocenzi, P. Falcaro, and E. Traversa, J. Eur. Ceram. Soc. 24, 1969 (2004).

A. Cabot, J. Arbiol, A. Cornet, J.R. Morante, F. Chen, and M. Liu, Thin Solid Films 436, 64 (2003).

G. Wirnsberger, B.J. Scott, and G.D. Stucky, Chem. Commun.


T. Yamada, H.S. Zhou, H. Uchida, M. Tomita, Y. Ueno, I.

Honma, K. Asai, and T. Katsube, Micropor. Mesopor. Mater. 54, 269 (2002).

C. Jin, J. Liu, X. Li, C. Coyle, J. Birnbaum, G.E. Fryxell, R.E. Williford, and S. Baskaran, MRS Symp. Proc. 612, D4.5.1 (2000).

C.M. Yang, A.T. Cho, F.M. Pan, T.G. Tsai, and K.J. Chao, Adv. Mater. 13, 1099 (2001).

L. Cot, A. Ayral, J. Durand, C. Guizard, N. Homanian, A. Julbe, and A. Larbot, Solid-State Sci. 2, 313 (2000).

M. Ogawa, J. Chem. Soc. Chem. Commun. 1149 (1996).

H. Yang, A. Kuperman, N. Coombs, S. Mamicho-Afara, and

G.A. Ozin, Nature 379, 703 (1996).

S. Pevzner, O. Regev, and R.Y. Yerushalui-Rozen, Curr. Opin.

Colloid Interface Sci. 4, 420 (2000).

K.J. Edler, and S.J. Roser, Int. Rev. Phys. Chem. 20, 387 (2001).

V.V. Guliants, M.A. Carreon, and Y.S. Lin, J. Membr. Sci. 235, 53 (2004).

H.W. Hillhouse, J.W. van Egmond, and M. Tsapatsis, Langmuir 15, 4544 (1999).

H. Miyata, and K. Kuroda, Chem. Mater. 12, 49 (2000).

H. Miyata, and K. Kuroda, J. Am. Chem. Soc. 12, 49 (2000).

D.A. Doshi, A. Gibaud, N. Liu, D. Sturmayr, A.P. Malanoski,

D.R. Dunphy, H. Chen, S. Narayanon, A. Macphee, J. Wang,

S.T. Reed, A.J. Hurd, F. Van Swod, and C.J. Brinker, J. Phys. Chem. B 107, 7683 (2003).

D. Grosso, F. Cagnol, C.J.d.A.A. Solar-Illia, E.L. Crepaldi, H. Amenitch, A. Brunet-Bruneau, A. Bourgeois, and C. Sanchez, Adv. Funct. Mater. 14, 309 (2004).

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J.Y. Chen, F.M. Pan, A.T. Cho, K.J. Chao, T.G. Tsai, B.W.Wu, C.M.Yang, and L. Chang, J. Electrochem. Soc. 150, F123 (2003).

P.S. Ho, J. Leu, and W.W. Lee (Eds.), Low Dielectric Constant Materials for IC Applications, Springer, Berlin, (2002).

K.J. Chao, P.H. Liu, K.Y. Huang, Y.R. Lee, S.L. Chang, in: E. Van Steened (Ed.), Proc. 14th Int. Zeolite Conf., 94 (2004).

M. Klotz, A.Ayral, C. Guizard, and L. Cot, Sep. Purif. Technol.

, 71 (2001).

D. Chen, Solar Energy Mater. Solar Cells 68, 313 (2001).